Spectropur Pressure Regulator E51-VCR

>Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
>Single-stage version
>Pressure regulator can be evacuated or special version for vacuum pressure control (see data sheet E51V-VCR)
>High control accuracy
>Metal-to-metal seal to atmosphere
>High surface quality
>Tied diaphragm
>Minimized internal volume for short purge times
>Electro-polished surfaces (gas wetted)
>Simple outlet pressure limitation by handwheel
>100 % Helium leak tested
>Assembly in cleanroom class ISO 5.0