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Spectropur Point of Use Stick EES55-1-VCR
Spectropur Point of Use Stick EES55-1-VCR
Product Features:
>Point of use stick for corrosive gases and gas mixtures with corrosive components from grade 6.0
• High control accuracy
• Pressure regulator with tied diaphragm
• Orbital welded VCR-connections
• Point of use can be evacuated
• Manual or pneumatic valve options:
- process gas inlet (TPI)
- purge gas inlet (SPI)
- purge gas vent (SPV)
- process gas outlet (TPO)
>100 % Helium leak tested
>Assembly in clean room class ISO 5.0
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